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It is capable of outputting a wide range of frequencies and is widely used in research institutions such as companies and universities.
*For combinations of frequency and output, please consult us separately. Example) Wideband power supply 10MHz–100MHz 250W 60MHz–180MHz 300W 20MHz–70MHz 500W 13MHz–54MHz 600W 150KHz–15MHz 1kW Example model: NM06M13M-54M-01 (Wideband RF power supply)
Capable of outputting multiple frequencies alternately, contributing to the densification of plasma and the development of new processes.
- Dual Frequency Power Supply 13.56MHz/27.12MHz 500W 1kW 2kW 5kW 27.12MHz/60MHz 3kW 2MHz/4MHz 1kW 2kW 400kHz/800kHz 500W - Triple Frequency Power Supply 27.12MHz/40.68MHz/54.24MHz 5kW 13.56MHz/27.12MHz/40.68MHz 500W 3kW 13.56MHz/27.12MHz/40.68MHz 20W - Quadruple Frequency Power Supply 13.56MHz/27.12MHz/40.68MHz/54.24MHz 1kW
We are engaged in the design and development of ultra-compact RF power supplies and matching devices to accommodate miniaturized equipment.
Output: 5W/10W/30W/50W/75W/100W (compact version) Frequency: 13.56MHz to 27.12MHz Frequency: Any frequency from 13.56MHz to 27.12MHz Rated output: 5W to 100W Input: AC100V single-phase or DC input Cooling method: Forced cooling External dimensions: Reference dimensions W140×D180×H110mm
LF band high-frequency power supply (e.g., 100kHz/150kHz/250kHz)
Example NL15N100K-XX Output Frequency: 100kHz ±0.01% Rated Output: 15kW Maximum Input Power: 40KVA Output Impedance: 50Ω Input Power: Input AC200V 3Φ Output Stability: Within ±1% of set output Cooling Method: Combined water and air cooling (22l/min) below 30℃
High Efficiency High Frequency Power Supply【NR3N-13】【NR3N-13】
The newly developed high-efficiency high-frequency power supply by NRF, the NR3N-13, has significantly improved durability compared to conventional high-efficiency RF power supplies, thanks to its unique high-reliability power amplifier. The weakness of high-efficiency amplifiers has been their structural vulnerability to reflected power; however, NRF's high-efficiency RF power supply boasts an impressive reflected power tolerance of over 600W against an output of 3kW, allowing it to withstand sudden load fluctuations such as short circuits and open circuits. Additionally, it is equipped with various protection circuits, making it a model that NRF confidently recommends.
This is a high-frequency power supply that performs matching adjustments by varying the frequency.
Features No matching box required, compact design, and cost reduction achieved No moving parts due to electronic control, maintenance-free Ultra-fast matching achieved ■ NR1S13M-01 Output power range: 0 to 1200W (when using internal calibration function) Maximum rated power: 1000W Rated maximum output: 1000W (continuous at 50Ω load) Output method: Continuous output Output impedance: 50±2Ω RF output connector: HN-R Output adjustment range: 0 to 1200W continuously variable (set in 1W increments) Rated output power: 1000W Output frequency: 13.56MHz Frequency stability: ±0.01% (10 to 40°C) crystal oscillation Frequency variable range: 13.2MHz to 15.0MHz (limited to F-match operation) Cooling method: Forced air cooling, rear exhaust External dimensions: W430×D640×H174 Weight: Approximately 29kg
Example: 300/380/400/800 (KHZ) 1/2 (MHZ)
Example NL5N400K-XX Output Frequency: 400KHz ±0.05% Rated Output: 5000W Maximum Input Power: 15KVA Output Impedance: 50Ω Input Power: Input AC 200V ±10% 3Φ Output Stability: Within ±2% of set output Cooling Method: Combined water and air cooling (8l/min) below 30℃ RF Output Connector: HN type
(Example: 4MHZ/13.56MHZ/27.12MHZ)
13.56MHz is a frequency band reserved for industrial, scientific, and medical purposes. It is currently the most commonly used frequency band, with 13.56MHz also being used for Suica and similar applications. *Various frequencies and outputs are supported beyond the above. Example: NR5N-XX Output frequency: 13.56MHz ±0.05% Rated output: 5000W Maximum input power: 9KVA Output impedance: 50Ω Input power: Input AC 200V ±10% 3Φ Output stability: Within ±2% of the set output Cooling method: Combined water and air cooling (7l/min) below 30℃ RF output connector: HN type
(Example: 300MHz/500MHz/915MHz)
It is used in terrestrial digital broadcasting and mobile phones, but in plasma applications, it is an unknown area and a frequency that is attracting great attention. *Various frequencies and outputs are supported beyond the above. Example: NR1N915M-01 Output Frequency: 915MHz ±0.05% Rated Output: 1000W Maximum Input Power: 3KVA Output Impedance: 50Ω Input Power: Input AC 200V ±10% 3Φ Output Stability: Within ±2% of the set output Cooling Method: Water-cooled (3l/min) sealed structure RF Output Connector: EIA 7/8
